Ultra Precise Position Tracking

Ultra Precise Position Tracking

in photolithography

During the photolithography process circuit patters of few nanometers in size are transferred from the photomask (reticle) via various lenses onto the semiconductor wafer. After the photomask pattern is projected to one part of the wafer, the wafer stage is moved and the lithography process is repeated until the whole wafer is covered with the respective patterns.

The ultraprecise position tracking and alignment of measurement frame, optics and wafer stage is key condition to ensure highest quality throughout the lithography process. All components used in this process need to meet the requirements of clean room conditions and - depending on the technology - be capable to perform under vacuum and high temperature environments.

attocube's solution

The laser interferometer IDS3010 measures linear displacements of a target. Based on the patented technology of a Fabry-Perot Interferometer, the IDS (industrial displacement sensor) captures real-time displacements for long working ranges. The glass-fiber based design allows for modular sensor setups and compact sensor heads.

Displacement Sensor IDS3010

displacement sensors, ids

Control Unit
  • 10 MHz bandwidth
  • 2 m/s target velocity
  • real-time
Sensor Heads
  • vacuum compatible
  • pluggable
  • compatible with different targets