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Displacement Measuring Interferometer

IDS3010 - minitaturized displacement measurement

certified accuracy

accuracy in nanometer range, PTB- and NIST-traceable

large distance range

from a few mm up to 30 m

compact and modular design

sensor heads Ø 1.2 mm, pluggable fibers and sensors

vacuum and clean room compatible

10-10 mbar .. 10 bar, a few mK .. 423 K

The IDS3010 (Interferometric Displacement Sensor) measures displacements (incremental distance) in the nanometer range. The modular and miniaturized design of the IDS3010 makes it easy to adapt all three measurement axes to a broad variety of applications.

With its compact size, the IDS3010 displacement measuring interferometer can be directly integrated into machines and is the product of choice for challenging OEM & synchrotron applications. A passively cooled housing minimizes noise and vibrations, and avoids disturbing other optical and electrical components.

For even more confined applications, sensor heads can be remotely operated and interconnected via glass fibers. The Fabry-Perot technology of the displacement measuring interferometer enables sensor heads with less components and thus more stable measurements.

A broad spectrum of digital and analog real-time interfaces and protocols enables the simple transmission of position data. The high-speed interfaces for real-time data communication are AquadB, proprietary serial word (HSSL), synthetic analog sin/cos/ and a linear analog output signal. All signals can be outputted as either single-ended (LVTTL) or differential (LVDS).

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Certified Accuracy

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Large Distance Range

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Compact and Modular Design

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Vacuum Compatible


number of sensor axes3
working distance0...5000 mm (depending on sensor head)
sensor resolution [pm]1
max. target velocity [m/s]2
measurement bandwidth10 MHz
signal stability (WD: 77 mm)0.110 nm (2 s)
Modes of Operation
measurement modedisplacement
remote operationintegrated webserver
output signal: displacement measurementlaser light (IR)
output signal: alignment laserlaser light (VIS)
sensor alignmentvia integrated webserver
sensor initializationvia integrated webserver
factory resetablevia GPIO connector
Working Conditions
controllerambient conditions
sensor headsdepending specifiactions
ECUambient conditions
analog interfacessin/cos (real time), linear analog (real time, optional)
digital interfacesAquadB, HSSL (real time)
real-time interface bandwidth [MHz]up to 25
interface bandwidth field bus systemsdepending on field bus system
resolution sin/cos (inc.)freely assignable; 1 pm - 2^24 pm
resolution AquadB (inc.)freely assignable
resolution HSSL (abs.) [bit]8 - 48
resolution field bus systemsdepending on implemented protocol
Controller Hardware
chassis55 x 52 x 195 mm³
weight730 g
power supply12 VDC
power consumption [W]8
laser source (measurement laser)DFBlaser (class1)
laser output power (measurement laser) [µW]max. 400
laser wavelength (measurement laser) [nm]1530
laser source (alignment laser)fiber-coupled laser diode
laser output power (alignment laser) [mW]< 0,5
laser wavelength (alignment laser) [nm]650
AccessoriesIDSH sensor heads, IDSECU, IDSMF single mode fibers, FVFT vacuum feedthroughs
Software Drivers
web browserno software drivers necessary as allfunctionality is accessible via Ethernet and C#-DLLs
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